Journal of Manufacturing Processes · 2022 · 23 citations · 23 references
EngineeringManufacturing EngineeringMaterials EngineeringManufacturing ProcessesForm DevelopmentForm MeasurementForm MetrologyForming ProcessesSacrificial Layer ProcessingAccuracyAccuracy AssessmentOptical Form MetrologySacrificial Layer CompatibilitySacrificial Layer DepositionSacrificial Layer PlanarizationSacrificial Layer Removal
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Monolithic Microfabricated Valves and Pumps by Multilayer Soft Lithography
Marc Unger, Hou-Pu Chou, Todd Thorsen et al. · Science · 2000 · 4K citations
Zhi-Ping Zheng, Hsin-Chuan Su, Fuang-Yuan Huang et al. · Journal of Micromechanics and Microengineering · 2007 · 131 citations
Engineering, Manufacturing Engineering, Electrochemical Engineering +12