Concepedia

Sacrificial Layer Removal

Sacrificial Layer Removal is a micromachining process step in which a transient structural layer, deliberately deposited and patterned during fabrication, is selectively etched away to release or suspend a functional microstructure, thereby enabling movable or freestanding components in bulk micromachined devices.

123

Publications

4.5K

Citations

607

Authors

192

Institutions

Publications per year

2017–2026

30

Parents

Publications

123

Ion‐Beam‐Assisted Lift‐Off Technique for Three‐Dimensional Micromachining of Freestanding Single‐Crystal Diamond

P. Olivero, Sergey Rubanov, P. Reichart et al. · Advanced Materials · 2005 · 181 citations · Full text

, , +16

Monolithic nanofluid sieving structures for DNA manipulation

Steve Turner, A. M. Perez, Alfred R. Lopez et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 160 citations

, , +16

Biomimetic sapphire windows enabled by inside-out femtosecond laser deep-scribing

Xueqing Liu, Yong‐Lai Zhang, Qiankun Li et al. · PhotoniX · 2022 · 152 citations · Full text

, , +17

Rolled-up transparent microtubes as two-dimensionally confined culture scaffolds of individual yeast cells

Gaoshan Huang, Yongfeng Mei, Dominic J. Thurmer et al. · Lab on a Chip · 2008 · 139 citations

, , +16

Efficient Conjugated‐Polymer Optoelectronic Devices Fabricated by Thin‐Film Transfer‐Printing Technique

Keng‐Hoong Yim, Zijian Zheng, Ziqi Liang et al. · Advanced Functional Materials · 2008 · 123 citations

, , +13

1–5 of 123

Authors

607

  1. CD
    Ching‐Liang Dai

    National Chung Hsing University, Taiwan

    4 publications · 102 citations

    4

    h-index

  2. KY
    Kai Yang

    University of Southampton, United Kingdom

    3 publications · 86 citations

    3

    h-index

  3. SB
    Steve Beeby

    University of Southampton, United Kingdom

    3 publications · 86 citations

    3

    h-index

  4. YW
    Yang Wei

    University of Southampton, United Kingdom

    3 publications · 86 citations

    3

    h-index

  5. RT
    Russel Torah

    University of Southampton, United Kingdom

    3 publications · 86 citations

    3

    h-index

1–5 of 607

Institutions

192

  1. National Chung Hsing University

    Taichung, Taiwan

    5 h-index

    14 publications

    286 citations

  2. University of Cambridge

    Cambridge, United Kingdom

    4 h-index

    11 publications

    1.1K citations

  3. Chinese Academy of Sciences

    Beijing, China

    4 h-index

    19 publications

    1.2K citations

  4. Korea Advanced Institute of Science and Technology

    Daejeon, South Korea

    4 h-index

    20 publications

    739 citations

  5. Jilin University

    Changchun, China

    3 h-index

    16 publications

    1.2K citations

  6. University of Southampton

    Southampton, United Kingdom

    3 h-index

    15 publications

    430 citations

  7. Swinburne University of Technology

    Melbourne, Australia

    3 h-index

    10 publications

    292 citations

  8. Samsung (South Korea)

    Seoul, South Korea

    3 h-index

    8 publications

    270 citations

1–8 of 192

Venues

  1. Journal of Micromechanics and Microengineering

    JMM · 11 publications · 239 citations

    10

    h-index

  2. Journal of Microelectromechanical Systems

    5 publications · 196 citations

    5

    h-index

  3. Applied Physics Letters

    5 publications · 178 citations

    5

    h-index

  4. ACS Applied Materials & Interfaces

    4 publications · 111 citations

    4

    h-index

  5. 4

    h-index

1–5