Concepedia

Run-to-run Control

Run-To-Run Control is a feedback control strategy in batch process systems that adjusts process inputs between successive manufacturing runs based on measured output deviations to drive continuous process improvement, distinguished from real-time control by its execution at discrete intervals between runs rather than continuously within a run.

167

Publications

6.7K

Citations

480

Authors

164

Institutions

Publications per year

2017–2026

21

Variants

R2r Control

Parents

Publications

167

Survey on iterative learning control, repetitive control, and run-to-run control

Youqing Wang, Furong Gao, Francis J. Doyle · Journal of Process Control · 2009 · 755 citations

, , +15

Supervisory run-to-run control of polysilicon gate etch using in situ ellipsometry

Stephanie Watts Butler, Jerry A. Stefani · IEEE Transactions on Semiconductor Manufacturing · 1994 · 226 citations

, , +14

Run-to-Run Process Control: Literature Review and Extensions

Enrique Del Castillo, Arnon Hurwitz · Journal of Quality Technology · 1997 · 217 citations

, , +14

An Approach for Factory-Wide Control Utilizing Virtual Metrology

Aftab Aslam Parwaz Khan, James Moyne, Dawn M. Tilbury · IEEE Transactions on Semiconductor Manufacturing · 2007 · 139 citations

, , +17

Chemical process control

Richard D. Braatz, O.D. Crisalle · International Journal of Robust and Nonlinear Control · 2007 · 136 citations

, , +16

1–5 of 167

Authors

480

  1. JM
    James Moyne

    University of Michigan, United States

    11 publications · 534 citations

    11

    h-index

  2. DS
    Duane S. Boning

    Massachusetts Institute of Technology, United States

    7 publications · 327 citations

    7

    h-index

  3. SJ
    Shi‐Shang Jang

    National Tsing Hua University, Taiwan

    7 publications · 208 citations

    7

    h-index

  4. ST
    Sheng‐Tsaing Tseng

    National Tsing Hua University, Taiwan

    7 publications · 179 citations

    7

    h-index

  5. TF
    Thomas F. Edgar

    The University of Texas at Austin, United States

    6 publications · 281 citations

    6

    h-index

1–5 of 480

Institutions

164

  1. University of Michigan

    Ann Arbor, United States

    13 h-index

    38 publications

    1.5K citations

  2. National Tsing Hua University

    Hsinchu, Taiwan

    12 h-index

    40 publications

    1K citations

  3. Massachusetts Institute of Technology

    Cambridge, United States

    10 h-index

    28 publications

    1.6K citations

  4. Hong Kong University of Science and Technology

    Hong Kong, Hong Kong

    10 h-index

    15 publications

    1.4K citations

  5. The University of Texas at Austin

    Austin, United States

    8 h-index

    12 publications

    466 citations

  6. Advanced Micro Devices (United States)

    Sunnyvale, United States

    6 h-index

    12 publications

    425 citations

  7. Tsinghua University

    Beijing, China

    6 h-index

    9 publications

    179 citations

  8. University of California, Los Angeles

    Los Angeles, United States

    6 h-index

    23 publications

    540 citations

1–8 of 164

Venues

  1. IEEE Transactions on Semiconductor Manufacturing

    38 publications · 1.8K citations

    23

    h-index

  2. Journal of Process Control

    10 publications · 1.1K citations

    10

    h-index

  3. IIE Transactions

    7 publications · 192 citations

    7

    h-index

  4. International Journal of Production Research

    6 publications · 144 citations

    6

    h-index

  5. 5

    h-index

1–5