Concepedia

Arnon Hurwitz

AH

Statistics

Publications

7

Citations

401

H-Index

7

Active since

1995

Affiliations

University of Michigan(Current)

Massachusetts Institute of Technology

Marcus (United States)

The University of Texas at Arlington

Arnon Hurwitz is an author at University of Michigan specializing in engineering, process control, and systems engineering.

Top concepts

EngineeringProcess ControlSystems EngineeringComputer EngineeringIndustrial EngineeringAutomationProcess DesignComputer ScienceProduction ControlOperations Research

Publications per year

1995–2002

7

Publications

7

Run-to-Run Process Control: Literature Review and Extensions

Enrique Del Castillo, Arnon Hurwitz · Journal of Quality Technology · 1997 · 216 citations

Run by run control of chemical-mechanical polishing

Duane S. Boning, William P. Moyne, T. Smith et al. · 2002 · 87 citations

Engineering, Industrial Engineering, Mechanical Engineering +18

Practical issues in run by run process control

Duane S. Boning, William P. Moyne, T. Smith et al. · 1995 · 29 citations

Engineering, Industrial Engineering, Run Process Control +18

A comparative analysis of run-to-run control algorithms in the semiconductor manufacturing industry

Zhe Ning, James Moyne, T. Smith et al. · 2002 · 26 citations

Real-time Control, Engineering, Semiconductor Manufacturing Industry +16

CAPABILITY INDICES FOR NON-NORMAL DATA

D. W. McCormack, Ian R. Harris, Arnon Hurwitz et al. · Quality Engineering · 2000 · 18 citations

Statistical Review, Image Size Additional, Index System +12

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