Concepedia

Pattern Distortion Correction

Pattern Distortion Correction is a methodological framework in mask design that systematically identifies and compensates for geometric deformations in patterning processes to ensure fidelity between the intended and fabricated mask patterns.

128

Publications

4.2K

Citations

515

Authors

144

Institutions

Publications per year

2017–2026

26

Parents

Publications

128

Probe compensation in thick microstrip patches

P.S. Hall · Electronics Letters · 1987 · 211 citations

, , +16

Suppression of Cross-Band Scattering in Multiband Antenna Arrays

Hai-Han Sun, Can Ding, He Zhu et al. · IEEE Transactions on Antennas and Propagation · 2019 · 179 citations · Full text

, , +16

Improving HF Radar Surface Current Measurements with Measured Antenna Beam Patterns

Josh Kohut, Scott Glenn · Journal of Atmospheric and Oceanic Technology · 2003 · 138 citations

, , +17

Phase correction for a distorted orbital angular momentum beam using a Zernike polynomials-based stochastic-parallel-gradient-descent algorithm

Guodong Xie, Yongxiong Ren, Hao Huang et al. · Optics Letters · 2015 · 134 citations

, , +13

Dimensional limitations of silicon nanolines resulting from pattern distortion due to surface tension of rinse water

Hideo Namatsu, Kenji Kurihara, Masao Nagase et al. · Applied Physics Letters · 1995 · 124 citations

, , +17

1–5 of 128

Authors

515

  1. AZ
    Avideh Zakhor

    University of California, Berkeley, United States

    5 publications · 240 citations

    5

    h-index

  2. SO
    Shigehisa Ohki

    NTT Basic Research Laboratories, Japan

    4 publications · 65 citations

    4

    h-index

  3. NB
    Nicolas B. Cobb

    Mentor Technologies, United States

    3 publications · 106 citations

    3

    h-index

  4. EY
    Edmund Y. Lam

    University of Hong Kong, Hong Kong SAR China

    3 publications · 73 citations

    3

    h-index

  5. EG
    Edward G. Lovell

    University of Wisconsin–Madison, United States

    3 publications · 41 citations

    3

    h-index

1–5 of 515

Institutions

144

  1. University of California, Berkeley

    Berkeley, United States

    8 h-index

    14 publications

    538 citations

  2. IBM (United States)

    Armonk, United States

    7 h-index

    20 publications

    525 citations

  3. ASML (Netherlands)

    Veldhoven, The Netherlands

    5 h-index

    22 publications

    607 citations

  4. University of Wisconsin–Madison

    Madison, United States

    4 h-index

    13 publications

    183 citations

  5. NTT Basic Research Laboratories

    Atsugi, Japan

    4 h-index

    11 publications

    706 citations

  6. Georgia Institute of Technology

    Atlanta, United States

    4 h-index

    11 publications

    209 citations

  7. Mentor Technologies

    Tulsa, United States

    3 h-index

    10 publications

    158 citations

  8. The University of Osaka

    Osaka, Japan

    3 h-index

    4 publications

    86 citations

1–8 of 144

Venues

  1. 16

    h-index

  2. Japanese Journal of Applied Physics

    JJAP · 7 publications · 125 citations

    7

    h-index

  3. Optics Express

    6 publications · 191 citations

    6

    h-index

  4. IEEE Transactions on Antennas and Propagation

    6 publications · 342 citations

    6

    h-index

  5. 5

    h-index

1–5