Concepedia

Pattern Collapse

Pattern Collapse is a structural failure mode in nanoscale lithography wherein high-aspect-ratio resist patterns irreversibly deform or topple during post-processing due to unbalanced capillary forces exceeding the pattern’s mechanical stability.

111

Publications

3.7K

Citations

503

Authors

108

Institutions

Publications per year

2017–2026

10

Parents

Publications

111

Mechanism of Resist Pattern Collapse during Development Process

Toshihiko Tanaka, Mitsuaki Morigami, Nobufumi Atoda · Japanese Journal of Applied Physics · 1993 · 347 citations

, , +13

Replica Molding of High-Aspect-Ratio Polymeric Nanopillar Arrays with High Fidelity

Ying Zhang, Chi-Wei Lo, J. Ashley Taylor et al. · Langmuir · 2006 · 221 citations

, , +17

Progressive Neoliberalism versus Reactionary Populism: A Choice that Feminists Should Refuse

Nancy Fraser · NORA - Nordic Journal of Feminist and Gender Research · 2016 · 124 citations

, , +16

Collapse of stamps for soft lithography due to interfacial adhesion

K. Jimmy Hsia, Yifeng Huang, Etienne Menard et al. · Applied Physics Letters · 2005 · 116 citations

, , +14

Understanding Pattern Collapse in Photolithography Process Due to Capillary Forces

Seyed Farshid Chini, Alidad Amirfazli · Langmuir · 2010 · 104 citations

, , +17

1–5 of 111

Authors

503

  1. HO
    Hiroaki Oizumi

    Association of Super-Advanced Electronics, Japan

    8 publications · 217 citations

    8

    h-index

  2. TI
    Toshiro Itani

    The University of Osaka, Japan

    6 publications · 116 citations

    6

    h-index

  3. HT
    Hideaki Tsubaki

    Fujifilm (Japan), Japan

    6 publications · 138 citations

    6

    h-index

  4. HT
    Hiroo Takizawa

    Fujifilm (Japan), Japan

    5 publications · 127 citations

    5

    h-index

  5. TT
    Toshihiko Tanaka

    Yamaguchi University, Japan

    5 publications · 494 citations

    5

    h-index

1–5 of 503

Institutions

108

  1. IMEC

    Leuven, Belgium

    8 h-index

    37 publications

    815 citations

  2. Fujifilm (Japan)

    Tokyo, Japan

    6 h-index

    30 publications

    733 citations

  3. Hitachi (Japan)

    Tokyo, Japan

    5 h-index

    10 publications

    262 citations

  4. University of Wisconsin–Madison

    Madison, United States

    5 h-index

    11 publications

    412 citations

  5. Hanyang University

    Seoul, South Korea

    5 h-index

    11 publications

    150 citations

  6. IBM Research - Thomas J. Watson Research Center

    Yorktown Heights, United States

    4 h-index

    10 publications

    272 citations

  7. Cornell University

    Ithaca, United States

    4 h-index

    22 publications

    1.3K citations

  8. Dai Nippon Printing (Japan)

    Tokyo, Japan

    4 h-index

    13 publications

    256 citations

1–8 of 108

Venues

  1. 17

    h-index

  2. Journal of Photopolymer Science and Technology

    13 publications · 298 citations

    11

    h-index

  3. Japanese Journal of Applied Physics

    JJAP · 11 publications · 610 citations

    11

    h-index

  4. ECS Transactions

    6 publications · 95 citations

    6

    h-index

  5. Nanotechnology

    4 publications · 61 citations

    4

    h-index

1–5