Concepedia

Author

Mitsuaki Morigami

Hitachi (Japan)

Also Known As

M. Morigami, Mitsuaki Morigami, Mitsuaki Morigami Mitsuaki Morigami

13

Publications

524

Citations

6

H-Index

24

Concepts

All Affiliations

Hitachi (Japan)
MM

About

Mitsuaki Morigami is an author at Hitachi (Japan) specializing in engineering, materials science, and applied physics.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

6

6

515

2

Applied Physics

5

5

464

3

Chemistry

1

1

25

4

Civil Engineering

1

1

24

5

Environmental Engineering

1

1

24

Mitsuaki Morigami

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6

Publications

515

Citations

6

H-Index

YearCitations

Mechanism of Resist Pattern Collapse during Development Process

Toshihiko Tanaka, Mitsuaki Morigami, Nobufumi Atoda

Japanese Journal of Applied Physics

1993

343

Freeze-Drying Process to Avoid Resist Pattern Collapse

Toshihiko Tanaka, Mitsuaki Morigami, Hiroaki Oizumi,

Japanese Journal of Applied Physics

1993

51

Mechanism of Resist Pattern Collapse

Toshihiko Tanaka, Mitsuaki Morigami, Nobufumi Atoda

Journal of The Electrochemical Society

1993

45

Prevention of Resist Pattern Collapse by Resist Heating during Rinsing

Toshihiko Tanaka, Mitsuaki Morigami, Hiroaki Oizumi,

Journal of The Electrochemical Society

1994

27

Photochemical Etching of GaAs using Synchrotron Radiation

Shingo Terakado, Junichi Nishino, Mitsuaki Morigami,

Japanese Journal of Applied Physics

1990

25

Prevention of Resist Pattern Collapse by Flood Exposure during Rinse Process

Toshihiko Tanaka, Mitsuaki Morigami, Hiroaki Oizumi,

Japanese Journal of Applied Physics

1994

24

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