Concepedia

Mitsuaki Morigami

MM

6

Publications

515

Citations

6

H-Index

1990

Active since

Affiliations

Hitachi (Japan)(Current)

Mitsuaki Morigami is an author at Hitachi (Japan) specializing in engineering, materials science, and applied physics.

Top concepts

EngineeringApplied PhysicsMaterial ScienceSurface ScienceMechanical EngineeringMechanics Of MaterialsMechanicsPhysicsChemistryMicroscopy

Publications per year

1990–1994

6

Publications

6

Mechanism of Resist Pattern Collapse during Development Process

Toshihiko Tanaka, Mitsuaki Morigami, Nobufumi Atoda · Japanese Journal of Applied Physics · 1993 · 343 citations

Materials Science, Pattern Formation, Development Process +12

Freeze-Drying Process to Avoid Resist Pattern Collapse

Toshihiko Tanaka, Mitsuaki Morigami, Hiroaki Oizumi et al. · Japanese Journal of Applied Physics · 1993 · 51 citations

Materials Science, Self-cleaning Surface, Freeze-thaw Cycling +12

Mechanism of Resist Pattern Collapse

Toshihiko Tanaka, Mitsuaki Morigami, Nobufumi Atoda · Journal of The Electrochemical Society · 1993 · 45 citations

Materials Science, Specific Resistance, Resist Pattern Collapse +13

Prevention of Resist Pattern Collapse by Resist Heating during Rinsing

Toshihiko Tanaka, Mitsuaki Morigami, Hiroaki Oizumi et al. · Journal of The Electrochemical Society · 1994 · 27 citations

Materials Engineering, Materials Science, Engineering +10

Photochemical Etching of GaAs using Synchrotron Radiation

Shingo Terakado, Junichi Nishino, Mitsuaki Morigami et al. · Japanese Journal of Applied Physics · 1990 · 25 citations

Semiconductors, Radiation Chemistry, Engineering +13

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