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Mechanism of Resist Pattern Collapse
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0
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1993
Year
Materials ScienceSpecific ResistanceResist Pattern CollapseRinse LiquidPhysicsMicrofabricationMechanicsMicroscopySurface ScienceApplied PhysicsMechanical EngineeringResist Development ProcessScanning Force MicroscopyResistorCollapse BehaviourEngineering
In this paper, the mechanism of resist pattern collapse during the resist development process is investigated by the use of atomic force microscope measurement of a pattern in the rinse liquid. The resist pattern collapse occurs during the rinse liquid is dried off, and the cause of collapse is the capillary force of the rinse liquid.