Concepedia

Mask Coating Materials

Mask Coating Materials is a specialized class of photoresist and deposition materials used in semiconductor lithography that selectively adhere to mask substrates to enable precise pattern transfer by differentially transmitting or blocking radiation during integrated circuit fabrication.

15

Publications

478

Citations

79

Authors

28

Institutions

Publications per year

2017–2026

5

Parents

Publications

15

A Capacitive Fringing Field Sensor Design for Moisture Measurement Based on Printed Circuit Board Technology

Robert N. Dean, Aditi Rane, Michael E. Baginski et al. · IEEE Transactions on Instrumentation and Measurement · 2011 · 129 citations

, , +15

Introducing masking layer for daytime radiative cooling coating to realize high optical performance, thin thickness, and excellent durability in long-term outdoor application

Yan Dong, Yanan Zou, Xiang Li et al. · Applied Energy · 2023 · 65 citations

, , +16

Review of technology for 157-nm lithography

A. K. Bates, M. Rothschild, T. M. Bloomstein et al. · IBM Journal of Research and Development · 2001 · 60 citations

, , +11

Surface innovation to enhance anti-droplet and hydrophobic behavior of breathable compressed-polyurethane masks

Saikat Sinha Ray, You-In Park, Hosik Park et al. · Environmental Technology & Innovation · 2020 · 40 citations · Full text

, , +16

Characterization of blood in an encrustation on an African mask: spectroscopic and direct analysis in real time mass spectrometric identification of haem

Daniel Fraser, Cathy Selvius DeRoo, Robert B. Cody et al. · The Analyst · 2013 · 29 citations

, , +16

1–5 of 15

Authors

79

  1. ZH
    Zane Hartzog

    Auburn University, United States

    2 publications · 148 citations

    2

    h-index

  2. DJ
    David J. Elton

    Auburn University, United States

    2 publications · 148 citations

    2

    h-index

  3. AR
    Aditi Rane

    Auburn University, United States

    2 publications · 148 citations

    2

    h-index

  4. ME
    Michael E. Baginski

    Auburn University, United States

    2 publications · 148 citations

    2

    h-index

  5. RN
    Robert N. Dean

    Auburn University, United States

    2 publications · 148 citations

    2

    h-index

1–5 of 79

Institutions

28

  1. Auburn University

    Auburn, United States

    2 h-index

    11 publications

    869 citations

  2. Bahauddin Zakariya University

    Multan, Pakistan

    1 h-index

    4 publications

    48 citations

  3. Universidade Estadual de Campinas (UNICAMP)

    Campinas, Brazil

    1 h-index

    2 publications

    26 citations

  4. University of Huddersfield

    Huddersfield, United Kingdom

    1 h-index

    2 publications

    24 citations

  5. Osipyan Institute of Solid State Physics RAS

    Chernogolovka, Russia

    1 h-index

    2 publications

    34 citations

  6. JEOL (United States)

    Peabody, United States

    1 h-index

    1 publications

    29 citations

  7. University of Southern California

    Los Angeles, United States

    1 h-index

    2 publications

    24 citations

  8. Nagoya Institute of Technology

    Nagoya, Japan

    1 h-index

    1 publications

    12 citations

1–8 of 28

Venues

  1. Thin Solid Films

    2 publications · 37 citations

    2

    h-index

  2. IBM Journal of Research and Development

    1 publications · 60 citations

    1

    h-index

  3. 1

    h-index

  4. 1

    h-index

  5. Applied Surface Science

    1 publications · 13 citations

    1

    h-index

1–5