Glass-based Packaging

Glass-Based Packaging is a hermetic encapsulation technique within MEMS packaging that utilizes glass materials as the primary sealing medium to provide electrical insulation, chemical inertness, and thermal stability, distinguished by its use of direct bonding or glass frit materials for chip-level enclosure.

86

Publications

2.8K

Citations

343

Authors

106

Institutions

Publications per year

2017–2026

34

Authors

343

  1. RT
    Rao Tummala

    Georgia Institute of Technology, United States

    14 publications · 458 citations

    14

    h-index

  2. VS
    Venky Sundaram

    Georgia Institute of Technology, United States

    10 publications · 283 citations

    10

    h-index

  3. VS
    Vanessa Smet

    Georgia Institute of Technology, United States

    8 publications · 266 citations

    8

    h-index

  4. MS
    Madhavan Swaminathan

    Georgia Institute of Technology, United States

    6 publications · 255 citations

    6

    h-index

  5. MJ
    Michael J. Topper

    Fraunhofer Institute for Reliability and Microintegration, Germany

    4 publications · 88 citations

    4

    h-index

1–5 of 343

Venues

  1. 8

    h-index

  2. Journal of Micromechanics and Microengineering

    JMM · 3 publications · 72 citations

    3

    h-index

  3. Microsystem Technologies

    3 publications · 239 citations

    3

    h-index

  4. Journal of the American Ceramic Society

    2 publications · 92 citations

    2

    h-index

  5. Sensors and Actuators A Physical

    2 publications · 25 citations

    2

    h-index

1–5