Concepedia

Ji-Eun Jung

JJ

2

Publications

65

Citations

2

H-Index

2020

Active since

Affiliations

University of Michigan(Current)

Samsung (South Korea)

Ji-Eun Jung is an author at University of Michigan specializing in microelectronics, applied physics, and microfabrication.

Top concepts

EngineeringNanotechnologyApplied PhysicsNanoelectronicsSurface ScienceMaterial ScienceMicroelectronicsMicrofabricationChemical EngineeringPhysics

Publications per year

2020–2020

2

Publications

2

Highly selective Si3N4/SiO2 etching using an NF3/N2/O2/H2 remote plasma. I. Plasma source and critical fluxes

Vladimir Volynets, Yuri Barsukov, Gonjun Kim et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2020 · 39 citations · Full text

Quantum Chemistry Simulations, Engineering, Vacuum Device +18

Highly selective Si3N4/SiO2 etching using an NF3/N2/O2/H2 remote plasma. II. Surface reaction mechanism

Ji-Eun Jung, Yuri Barsukov, Vladimir Volynets et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2020 · 26 citations · Full text

Selective Etching, Engineering, Vacuum Device +20

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