Concepedia

Ji-Eun Jung

JJ

Statistics

Publications

2

Citations

65

H-Index

2

Active since

2020

Affiliations

University of Michigan(Current)

Samsung (South Korea)

Ji-Eun Jung is an author at University of Michigan specializing in microelectronics, applied physics, and microfabrication.

Top concepts

Publications per year

2020–2020

2

Publications

2

Highly selective Si3N4/SiO2 etching using an NF3/N2/O2/H2 remote plasma. I. Plasma source and critical fluxes

Vladimir Volynets, Yuri Barsukov, Gonjun Kim et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2020 · 39 citations · Full text

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Highly selective Si3N4/SiO2 etching using an NF3/N2/O2/H2 remote plasma. II. Surface reaction mechanism

Ji-Eun Jung, Yuri Barsukov, Vladimir Volynets et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2020 · 26 citations · Full text

, , +20

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