M. F. Pas

Kinetics and nucleation model of the C49 to C54 phase transformation in TiSi2 thin films on deep-sub-micron <i>n</i>+ type polycrystalline silicon lines

J. A. Kittl, Douglas A. Prinslow, Pushkar P. Apte et al. · Applied Physics Letters · 1995 · 104 citations

Natural Sciences, Materials Engineering, Materials Science +17

Improvement of FinFET Electrical Characteristics by Hydrogen Annealing

G. Gebara, Jannat Ara Zaman, Michael L. Gostkowski et al. · IEEE Electron Device Letters · 2004 · 87 citations

Engineering, Electrical Engineering, Semiconductor Devices +15

Computation of the transport coefficients of dense fluid neon, argon, krypton and xenon by molecular dynamics

M. F. Pas, Bruno J. Zwolinski · Molecular Physics · 1991 · 38 citations

Natural Sciences, Chemistry, Physics +16

Ultrathin nitrogen-profile engineered gate dielectric films

S. V. Hattangady, R. Kraft, D.T. Grider et al. · 2002 · 35 citations

Engineering, Materials Engineering, Materials Science +17

Effects of Drying Methods and Wettability of Silicon on the Formation of Water Marks in Semiconductor Processing

Jin‐Goo Park, M. F. Pas · Journal of The Electrochemical Society · 1995 · 24 citations

Engineering, Materials Engineering, Materials Science +16