Pushkar P. Apte

Kinetics and nucleation model of the C49 to C54 phase transformation in TiSi2 thin films on deep-sub-micron <i>n</i>+ type polycrystalline silicon lines

J. A. Kittl, Douglas A. Prinslow, Pushkar P. Apte et al. · Applied Physics Letters · 1995 · 104 citations

Materials Science, Nanoscale Science, Engineering +13

Correlation of trap generation to charge-to-breakdown (Q/sub bd/): a physical-damage model of dielectric breakdown

Pushkar P. Apte, Krishna C. Saraswat · IEEE Transactions on Electron Devices · 1994 · 100 citations

Engineering, Electronic Properties, Trap Generation +16

Rapid thermal processing uniformity using multivariable control of a circularly symmetric 3 zone lamp

Pushkar P. Apte, Krishna C. Saraswat · IEEE Transactions on Semiconductor Manufacturing · 1992 · 56 citations

Engineering, Defect Introduction, Good Temperature Uniformity +9

SiO/sub 2/ degradation with charge injection polarity

Pushkar P. Apte, Krishna C. Saraswat · IEEE Electron Device Letters · 1993 · 54 citations

Semiconductors, Electrical Engineering, Engineering +14

Constant Current Stress Breakdown in Ultrathin SiO2 Films

Pushkar P. Apte, T. Kubota, Krishna C. Saraswat · Journal of The Electrochemical Society · 1993 · 45 citations · Full text

Materials Science, Ultrathin Oxides, Electrical Engineering +13