H. Etienne

Micro and nano-structuration of silicon by femtosecond laser: Application to silicon photovoltaic cells fabrication

Mathieu Halbwax, T. Sarnet, Ph. Delaporte et al. · Thin Solid Films · 2007 · 209 citations

Materials Science, Engineering, Physics +10

Femtosecond laser for black silicon and photovoltaic cells

T. Sarnet, Mathieu Halbwax, R. Torres et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 43 citations

Engineering, Laser Science, Laser Applications +16

Femtosecond laser texturization for improvement of photovoltaic cells : black silicon

R. Torres, V. Vervisch, Mathieu Halbwax et al. · HAL (Le Centre pour la Communication Scientifique Directe) · 2010 · 29 citations

Effective Modulation of Ni Silicide Schottky Barrier Height Using Chlorine Ion Implantation and Segregation

Wei-Yip Loh, H. Etienne, Brian E. Coss et al. · IEEE Electron Device Letters · 2009 · 16 citations

Materials Engineering, Chlorine Segregates, Ion Implantation +10

PULSION® HP: Tunable, High Productivity Plasma Doping

Susan B. Felch, Frank Torregrosa, H. Etienne et al. · AIP conference proceedings · 2011 · 13 citations

Materials Science, Electrical Engineering, Ion Implantation +14