Statistics
Publications
32
Citations
1K
H-Index
18
Active since
2000
Heidi B. Cao is an author at Intel (United States) specializing in materials science, natural sciences, and materials engineering.
Publications per year
2000–2008
32
32
Acid distribution in chemically amplified extreme ultraviolet resist
Takahiro Kozawa, Seiichi Tagawa, Heidi B. Cao et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2007 · 152 citations
Natural Sciences, Materials Engineering, Materials Science +13
Comparison of resist collapse properties for deep ultraviolet and 193 nm resist platforms
Heidi B. Cao, Paul F. Nealey, Wolf‐Dieter Domke · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 88 citations
Natural Sciences, Materials Engineering, Materials Science +15
1–5 of 32