Ken Collins - Concepedia

Author

Ken Collins

Applied Materials (United States)

Also Known As

Collins, Ken, K E Collins, Ken Collins

Publications

748

Citations

H-Index

Concepts

All Affiliations

Applied Materials (United States)Samsung (South Korea)

About

Ken Collins is an author at Applied Materials (United States) specializing in engineering, electrical engineering, and applied physics.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	14	18	633
2	Applied Physics	13	13	467
3	Electrical Engineering	13	17	595
4	Physics	12	12	460
5	Computer Engineering	1	1	33

Ken Collins

Publications

698

Citations

H-Index

Page 1

	Year	Citations
Self-consistent simulation of very high frequency capacitively coupled plasmas Shahid Rauf, Kallol Bera, Ken Collins Plasma Sources Science and Technology Electron DensityElectrical EngineeringEngineeringRadio FrequencyPhysics	2008	101
Effects of interelectrode gap on high frequency and very high frequency capacitively coupled plasmas Kallol Bera, Shahid Rauf, K. Ramaswamy, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films EngineeringElectric Field EnhancementPlasma SciencePlasma PhysicsHigh Frequency	2009	56
Effect of simultaneous source and bias pulsing in inductively coupled plasma etching Ankur Agarwal, Phillip J. Stout, S. Banna, Journal of Applied Physics Pulsed PlasmasSimultaneous SourceElectrical EngineeringEngineeringPlasma Simulation	2009	56
Control of plasma uniformity in a capacitive discharge using two very high frequency power sources Kallol Bera, Shahid Rauf, K. Ramaswamy, Journal of Applied Physics	2009	54
Self-consistent electrodynamics of large-area high-frequency capacitive plasma discharge Zhigang Chen, Shahid Rauf, Ken Collins Journal of Applied Physics EngineeringPlasma SciencePlasma PhysicsHigh FrequencyPlasma Electronics	2010	50
Power dynamics in a low pressure capacitively coupled plasma discharge Shahid Rauf, Kallol Bera, Ken Collins Plasma Sources Science and Technology EngineeringPlasma SciencePlasma PhysicsPeak Electron DensityPlasma Electronics	2009	44
Gas heating mechanisms in capacitively coupled plasmas Ankur Agarwal, Shahid Rauf, Ken Collins Plasma Sources Science and Technology Cf4 Fraction IncreasesEngineeringPlasma PhysicsPlasma ProcessingGas Heating Mechanisms	2012	38
Effect of resonance in external radio-frequency circuit on very high frequency plasma discharge Shahid Rauf, Zhigang Chen, Ken Collins Journal of Applied Physics Electron DensityElectrical EngineeringEngineeringPhysicsExternal Radio-frequency Circuit	2010	37
Influence of inhomogeneous magnetic field on the characteristics of very high frequency capacitively coupled plasmas Kallol Bera, Shahid Rauf, Jason Kenney, Journal of Applied Physics MagnetismElectron DensityElectrical EngineeringEngineeringInhomogeneous Magnetic Field	2010	36
Three-dimensional model of magnetized capacitively coupled plasmas Shahid Rauf, Jason Kenney, Ken Collins Journal of Applied Physics EngineeringMagnetized Plasma PhysicsPlasma ScienceMagnetized PlasmaPlasma Physics	2009	36

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