Concepedia

Ken Collins

KC

20

Publications

698

Citations

15

H-Index

2008

Active since

Affiliations

Applied Materials (United States)(Current)

Samsung (South Korea)

Ken Collins is an author at Applied Materials (United States) specializing in engineering, electrical engineering, and applied physics.

Top concepts

Publications per year

2008–2021

20

Publications

20

Self-consistent simulation of very high frequency capacitively coupled plasmas

Shahid Rauf, Kallol Bera, Ken Collins · Plasma Sources Science and Technology · 2008 · 101 citations

, , +15

Effects of interelectrode gap on high frequency and very high frequency capacitively coupled plasmas

Kallol Bera, Shahid Rauf, K. Ramaswamy et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2009 · 56 citations

, , +17

Effect of simultaneous source and bias pulsing in inductively coupled plasma etching

Ankur Agarwal, Phillip J. Stout, S. Banna et al. · Journal of Applied Physics · 2009 · 56 citations

, , +12

Control of plasma uniformity in a capacitive discharge using two very high frequency power sources

Kallol Bera, Shahid Rauf, K. Ramaswamy et al. · Journal of Applied Physics · 2009 · 54 citations

Self-consistent electrodynamics of large-area high-frequency capacitive plasma discharge

Zhigang Chen, Shahid Rauf, Ken Collins · Journal of Applied Physics · 2010 · 50 citations

, , +17

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