Statistics
Publications
4
Citations
190
H-Index
4
Active since
1990
Affiliations
Toshiba (Japan)(Current)
Yoshiaki Akama is an author at Toshiba (Japan) specializing in materials science, surface science, and scanning probe microscopy.
Publications per year
1990–1993
4
4
Smoothing of the Si surface using CF4/O2 down-flow etching
Hirotaka Nishino, N. Hayasaka, Keiji Horioka et al. · Journal of Applied Physics · 1993 · 15 citations
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