3
Publications
47
Citations
3
H-Index
1993
Active since
Affiliations
Hirotaka Nishino is an author at Association of Super-Advanced Electronics specializing in surface science, engineering, and applied physics.
Top concepts
EngineeringApplied PhysicsSurface ScienceMaterial ScienceMicroelectronicsThin FilmsNanotechnologyNanoelectronicsMicrofabricationCrystalline Defects
Publications per year
1993–2003
3
3
Smoothing of the Si surface using CF4/O2 down-flow etching
Hirotaka Nishino, N. Hayasaka, Keiji Horioka et al. · Journal of Applied Physics · 1993 · 15 citations
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1–3 of 3