Concepedia

Atsushi Noya

AN

Statistics

Publications

23

Citations

611

H-Index

14

Active since

1988

Affiliations

Kitami Institute of Technology(Current)

Tohoku University

Atsushi Noya is an author at Kitami Institute of Technology specializing in materials engineering, materials science, and thin films.

Publications per year

1988–2016

23

Publications

23

Properties of TaN<i>x</i> films as diffusion barriers in the thermally stable Cu/Si contact systems

Mayumi B. Takeyama, Atsushi Noya, Touko Sase et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 114 citations

Natural Sciences, Materials Engineering, Materials Science +17

Diffusion barrier properties of ZrN films in the Cu/Si contact systems

Mayumi B. Takeyama, Atsushi Noya, Kouichirou Sakanishi · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 74 citations

Engineering, Materials Engineering, Materials Science +17

High performance of thin nano-crystalline ZrN diffusion barriers in Cu/Si contact systems

Mayumi B. Takeyama, Takaomi Itoi, Eiji Aoyagi et al. · Applied Surface Science · 2002 · 47 citations

Natural Sciences, Materials Engineering, Materials Science +16

Preparation of WN<sub>x</sub> Films and Their Diffusion Barrier Properties in Cu/Si Contact Systems

Mayumi Takeyama Mayumi Takeyama, Atsushi Noya · Japanese Journal of Applied Physics · 1997 · 40 citations

Natural Sciences, Materials Engineering, Materials Science +17

Stoichiometry of Ta–N Film and Its Application for Diffusion Barrier in the Al<sub>3</sub>Ta/Ta–N/Si Contact System

Katsutaka Sasaki, Atsushi Noya, Toshiji Umezawa · Japanese Journal of Applied Physics · 1990 · 32 citations

Engineering, Materials Engineering, Materials Science +17

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