Concepedia

Toshiji Umezawa

TU

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Publications

2

Citations

43

H-Index

2

Active since

1988

Affiliations

Kitami Institute of Technology(Current)

Toshiji Umezawa is an author at Kitami Institute of Technology specializing in thin films, materials engineering, and materials science.

Publications per year

1988–1990

2

Publications

2

Stoichiometry of Ta–N Film and Its Application for Diffusion Barrier in the Al<sub>3</sub>Ta/Ta–N/Si Contact System

Katsutaka Sasaki, Atsushi Noya, Toshiji Umezawa · Japanese Journal of Applied Physics · 1990 · 32 citations

, , +17

Preparation and Characterizations of Al<sub>3</sub>Ta Intermetallic Compound Films

Katsutaka Sasaki, Atsushi Noya, Toshiji Umezawa · Japanese Journal of Applied Physics · 1988 · 11 citations

, , +17

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