Concepedia

Mayumi Takeyama Mayumi Takeyama

MT

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Publications

3

Citations

68

H-Index

3

Active since

1993

Affiliations

Kitami Institute of Technology(Current)

Mayumi Takeyama Mayumi Takeyama is an author at Kitami Institute of Technology specializing in surface science, thin films, and materials science.

Publications per year

1993–1997

3

Publications

3

Preparation of WN<sub>x</sub> Films and Their Diffusion Barrier Properties in Cu/Si Contact Systems

Mayumi Takeyama Mayumi Takeyama, Atsushi Noya · Japanese Journal of Applied Physics · 1997 · 40 citations

, , +17

Auger Electron Spectroscopy Study on the Stability and the Interfacial Reaction of Ta, Ta-N and TaN Films as a Diffusion Barrier between Cu<sub>9</sub>Al<sub>4</sub> Film and Si

Atsushi Noya, Katsutaka Sasaki, Mayumi Takeyama Mayumi Takeyama · Japanese Journal of Applied Physics · 1993 · 18 citations

, , +17

Oxidation Behavior of Ta Thin Films as a Passivation Layer Deposited on Cu

Takaaki Ichikawa, Mayumi Takeyama Mayumi Takeyama, Atsushi Noya · Japanese Journal of Applied Physics · 1996 · 10 citations

, , +17

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