Statistics
Publications
1
Citations
114
H-Index
1
Active since
1996
Affiliations
Kitami Institute of Technology(Current)
Touko Sase is an author at Kitami Institute of Technology specializing in interface science, contact materials, and barrier materials.
Publications per year
1996–1996
1
1
Properties of TaN<i>x</i> films as diffusion barriers in the thermally stable Cu/Si contact systems
Mayumi B. Takeyama, Atsushi Noya, Touko Sase et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 114 citations
Natural Sciences, Materials Engineering, Materials Science +17
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