Concepedia

Kouichirou Sakanishi

KS

Statistics

Publications

3

Citations

107

H-Index

3

Active since

1996

Affiliations

Kitami Institute of Technology(Current)

Kouichirou Sakanishi is an author at Kitami Institute of Technology specializing in materials engineering, materials science, and resistivity.

Publications per year

1996–2000

3

Publications

3

Diffusion barrier properties of ZrN films in the Cu/Si contact systems

Mayumi B. Takeyama, Atsushi Noya, Kouichirou Sakanishi · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 74 citations

, , +17

Solid-Phase Reactions of Diffusion Barriers of Ti and TiN to Copper Layers on SiO<sub>2</sub>

Mayumi B. Takeyama, Atsushi Noya, Kouichirou Sakanishi et al. · Japanese Journal of Applied Physics · 1996 · 20 citations

, , +17

Application of amorphous Cu–Zr binary alloy as a diffusion barrier in Cu/Si contact systems

Mayumi B. Takeyama, Shinya Kagomi, Atsushi Noya et al. · Journal of Applied Physics · 1996 · 13 citations

, , +17

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