Syun‐Ming Jang

Statistics

Publications

Citations

515

H-Index

Active since

1991

Affiliations

Taiwan Semiconductor Manufacturing Company (Taiwan)(Current)

National Yang Ming Chiao Tung University

Massachusetts Institute of Technology

Taiwan Semiconductor Manufacturing Company (United States)

National Tsing Hua University

Syun‐Ming Jang is an author at Taiwan Semiconductor Manufacturing Company (Taiwan) specializing in materials science, materials engineering, and electronic materials.

Publications per year

1991–2004

Publications

Temperature dependence of Si1−xGex epitaxial growth using very low pressure chemical vapor deposition

Syun‐Ming Jang, R. Reif · Applied Physics Letters · 1991 · 78 citations

Natural Sciences, Materials Engineering, Materials Science +16

Mechanical property analyses of porous low-dielectric-constant films for stability evaluation of multilevel-interconnect structures

Shou-Yi Chang, Hui-Lin Chang, Yung-Cheng Lu et al. · Thin Solid Films · 2004 · 48 citations

Natural Sciences, Materials Engineering, Materials Science +15

Effects of hydrogen and deposition pressure on Si1−xGex growth rate

Syun‐Ming Jang, R. Reif · Applied Physics Letters · 1992 · 33 citations

Natural Sciences, Materials Engineering, Materials Science +16

Physical and Barrier Properties of Amorphous Silicon-Oxycarbide Deposited by PECVD from Octamethylcyclotetrasiloxane

Chiu-Chih Chiang, Mao‐Chieh Chen, Lain‐Jong Li et al. · Journal of The Electrochemical Society · 2004 · 26 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Chemical Vapor Deposition of Epitaxial Silicon‐Germanium from Silane and Germane: I . Kinetics

Syun‐Ming Jang, Kenneth Liao, R. Reif · Journal of The Electrochemical Society · 1995 · 25 citations

Engineering, Materials Engineering, Materials Science +17

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