Concepedia

Hui-Lin Chang

HC

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Publications

1

Citations

48

H-Index

1

Active since

2004

Affiliations

Taiwan Semiconductor Manufacturing Company (Taiwan)(Current)

Hui-Lin Chang is an author at Taiwan Semiconductor Manufacturing Company (Taiwan) specializing in mechanical property enhancement, thin films, and porosity characterization.

Publications per year

2004–2004

1

Publications

1

Mechanical property analyses of porous low-dielectric-constant films for stability evaluation of multilevel-interconnect structures

Shou-Yi Chang, Hui-Lin Chang, Yung-Cheng Lu et al. · Thin Solid Films · 2004 · 48 citations

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