Concepedia

Yung-Cheng Lu

YL

Statistics

Publications

6

Citations

125

H-Index

6

Active since

1997

Affiliations

Taiwan Semiconductor Manufacturing Company (Taiwan)(Current)

National Yang Ming Chiao Tung University

National Tsing Hua University

National Chung Hsing University

Yung-Cheng Lu is an author at Taiwan Semiconductor Manufacturing Company (Taiwan) specializing in natural sciences, materials science, and thin films.

Publications per year

1997–2004

6

Publications

6

Mechanical property analyses of porous low-dielectric-constant films for stability evaluation of multilevel-interconnect structures

Shou-Yi Chang, Hui-Lin Chang, Yung-Cheng Lu et al. · Thin Solid Films · 2004 · 48 citations

, , +15

Improvement in Leakage Current and Breakdown Field of Cu-Comb Capacitor Using a Silicon Oxycarbide Dielectric Barrier

Chiu-Chih Chiang, I-Hsiu Ko, Mao‐Chieh Chen et al. · Journal of The Electrochemical Society · 2004 · 20 citations

, , +17

Curing Process Window and Thermal Stability of Porous MSQ-Based Low-Dielectric-Constant Materials

Shou-Yi Chang, Tzu-Jen Chou, Yung-Cheng Lu et al. · Journal of The Electrochemical Society · 2004 · 16 citations

, , +17

Synthesis and magnetic properties of Ni–Al2O3 thin films

Gerald T. Kraus, Yung-Cheng Lu, Jessika E. Trancik et al. · Journal of Applied Physics · 1997 · 15 citations

, , +17

Leakage and Breakdown Mechanisms of Cu Comb Capacitors with Bilayer-Structured α-SiCN/α-SiC Cu-Cap Barriers

Chiu-Chih Chiang, I-Hsiu Ko, Mao‐Chieh Chen et al. · Journal of The Electrochemical Society · 2004 · 15 citations

, , +17

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