Concepedia

Mao‐Chieh Chen

MC

33

Publications

727

Citations

19

H-Index

1971

Active since

Affiliations

National Yang Ming Chiao Tung University(Current)

Taiwan Semiconductor Manufacturing Company (Taiwan)

Taiwan Semiconductor Manufacturing Company (United States)

General Motors (United States)

Mao‐Chieh Chen is an author at National Yang Ming Chiao Tung University specializing in materials science, engineering, and applied physics.

Top concepts

EngineeringMaterial ScienceApplied PhysicsThin FilmsElectrical EngineeringSurface ScienceMaterials EngineeringMicroelectronicsChemistrySemiconductors

Publications per year

1971–2007

33

Publications

33

Sputter-deposited Mo and reactively sputter-deposited Mo-N films as barrier layers against Cu diffusion

Jui‐Chang Chuang, Shuo‐Lun Tu, Mao‐Chieh Chen · Thin Solid Films · 1999 · 60 citations

Materials Science, Barrier Layers, Sputter-deposited Mo-n Films +9

Properties of thin Ta–N films reactively sputtered on Cu/SiO2/Si substrates

Jui‐Chang Chuang, Mao‐Chieh Chen · Thin Solid Films · 1998 · 49 citations

Materials Science, Engineering, Surface Science +7

The Processing Windows for Selective Copper Chemical Vapor Deposition from Cu(hexafluoroacetylacetonate)trimethylvinylsilane

Jung‐Chao Chiou, Kuen‐Chi Juang, Mao‐Chieh Chen · Journal of The Electrochemical Society · 1995 · 46 citations

Engineering, Chemistry, Chemical Deposition +16

Copper Chemical Vapor Deposition Films Deposited from Cu(1,1,1,5,5,5-hexafluoroacetylacetonate) vinyltrimethylsilane

Pi-Jiun Lin, Mao‐Chieh Chen · Japanese Journal of Applied Physics · 1999 · 39 citations

Materials Science, Cu Films, Chemical Engineering +11

Physical and Barrier Properties of Amorphous Silicon-Oxycarbide Deposited by PECVD from Octamethylcyclotetrasiloxane

Chiu-Chih Chiang, Mao‐Chieh Chen, Lain‐Jong Li et al. · Journal of The Electrochemical Society · 2004 · 26 citations · Full text

Engineering, Thin Film Process Technology, Chemistry +16

Rows per page

1–5 of 33