Concepedia

Shuo‐Lun Tu

ST

3

Publications

104

Citations

3

H-Index

1998

Active since

Affiliations

National Yang Ming Chiao Tung University(Current)

Shuo‐Lun Tu is an author at National Yang Ming Chiao Tung University specializing in applied physics, thin films, and materials science.

Top concepts

Publications per year

1998–1999

3

Publications

3

Sputter-deposited Mo and reactively sputter-deposited Mo-N films as barrier layers against Cu diffusion

Jui‐Chang Chuang, Shuo‐Lun Tu, Mao‐Chieh Chen · Thin Solid Films · 1999 · 60 citations

, , +9

Sputtered Cr and Reactively Sputtered CrN x Serving as Barrier Layers Against Copper Diffusion

Jui‐Chang Chuang, Shuo‐Lun Tu, Mao‐Chieh Chen · Journal of The Electrochemical Society · 1998 · 26 citations

, , +20

Rapid Thermal Annealed Cr Barrier Against Cu Diffusion

Jui‐Chang Chuang, Shuo‐Lun Tu, Mao‐Chieh Chen · Journal of The Electrochemical Society · 1999 · 18 citations

, , +15

Rows per page

1–3 of 3