Concepedia

Jui‐Chang Chuang

JC

7

Publications

211

Citations

7

H-Index

1998

Active since

Affiliations

National Yang Ming Chiao Tung University(Current)

Jui‐Chang Chuang is an author at National Yang Ming Chiao Tung University specializing in applied physics, thin films, and materials science.

Top concepts

Thin FilmsEngineeringApplied PhysicsMaterial ScienceSurface ScienceMaterials EngineeringCrystalline DefectsElectrical EngineeringPhysicsMicrostructure

Publications per year

1998–1999

7

Publications

7

Sputter-deposited Mo and reactively sputter-deposited Mo-N films as barrier layers against Cu diffusion

Jui‐Chang Chuang, Shuo‐Lun Tu, Mao‐Chieh Chen · Thin Solid Films · 1999 · 60 citations

Materials Science, Barrier Layers, Sputter-deposited Mo-n Films +9

Properties of thin Ta–N films reactively sputtered on Cu/SiO2/Si substrates

Jui‐Chang Chuang, Mao‐Chieh Chen · Thin Solid Films · 1998 · 49 citations

Materials Science, Engineering, Surface Science +7

Sputtered Cr and Reactively Sputtered CrN x Serving as Barrier Layers Against Copper Diffusion

Jui‐Chang Chuang, Shuo‐Lun Tu, Mao‐Chieh Chen · Journal of The Electrochemical Society · 1998 · 26 citations

Engineering, Thin Film Process Technology, Semiconductors +20

Passivation of Cu by Sputter‐Deposited Ta and Reactively Sputter‐Deposited Ta‐Nitride Layers

Jui‐Chang Chuang, Mao‐Chieh Chen · Journal of The Electrochemical Society · 1998 · 20 citations

Materials Science, Ta Target, Ta Passivation +11

Formation of CrO and CrNO films serving as Cu oxidation resistant layers and their N2 pre-sintering effect

Jui‐Chang Chuang, Mao‐Chieh Chen · Thin Solid Films · 1998 · 20 citations

Rows per page

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