Woong Sun Lim

Atomic layer etching of graphene for full graphene device fabrication

Woong Sun Lim, Yi Yeon Kim, Hyeongkeun Kim et al. · Carbon · 2011 · 91 citations

Materials Science, Graphene Nanomeshes, Electrical Engineering +9

Atomic layer etching of ultra-thin HfO₂film for gate oxide in MOSFET devices

Jae Beom Park, Woong Sun Lim, Byoung Jae Park et al. · Journal of Physics D Applied Physics · 2009 · 63 citations

Engineering, Atomic Layer Etching, Silicon On Insulator +18

Atomic layer etching of (100)/(111) GaAs with chlorine and low angle forward reflected Ne neutral beam

Woong Sun Lim, Sang Duk Park, Byoung Jae Park et al. · Surface and Coatings Technology · 2008 · 34 citations

Electrical Engineering, Low Angle, Engineering +11

Etch Characteristics of TiO2 Etched by Using an Atomic Layer Etching technique with BCl3 Gas and an Ar Neutral Beam

Jae Beom Park, Woong Sun Lim, Sang Duk Park et al. · Journal of the Korean Physical Society · 2009 · 27 citations

Materials Science, Materials Engineering, Ar Neutral Beam +6