Woong Sun Lim - Concepedia

Author

Woong Sun Lim

Also Known As

Woong Sun Lim

Publications

227

Citations

H-Index

Concepts

All Affiliations

Woong Sun Lim is an author at Sungkyunkwan University specializing in applied physics, engineering, and materials science.

#	Concept	H-Index	Publications	Citations
1	Engineering	4	4	215
2	Applied Physics	4	4	215
3	Electrical Engineering	3	3	188
4	Materials Science	3	3	181
5	Materials Engineering	1	1	27

Woong Sun Lim

Publications

215

Citations

H-Index

Page 1

	Year	Citations
Atomic layer etching of graphene for full graphene device fabrication Woong Sun Lim, Yi Yeon Kim, Hyeongkeun Kim, Carbon Materials ScienceGraphene NanomeshesElectrical EngineeringEngineeringNanoelectronics	2011	91
Atomic layer etching of ultra-thin HfO<sub>2</sub>film for gate oxide in MOSFET devices Jae Beom Park, Woong Sun Lim, Byoung Jae Park, Journal of Physics D Applied Physics EngineeringAtomic Layer EtchingSilicon On InsulatorHfo2-nmosfet DevicesSemiconductor Device	2009	63
Atomic layer etching of (100)/(111) GaAs with chlorine and low angle forward reflected Ne neutral beam Woong Sun Lim, Sang Duk Park, Byoung Jae Park, Surface and Coatings Technology Electrical EngineeringLow AngleEngineeringPhysicsElectron-beam Lithography	2008	34
Etch Characteristics of TiO2 Etched by Using an Atomic Layer Etching technique with BCl3 Gas and an Ar Neutral Beam Jae Beom Park, Woong Sun Lim, Sang Duk Park, Journal of the Korean Physical Society Materials ScienceMaterials EngineeringAr Neutral BeamEngineeringApplied Physics	2009	27

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