Concepedia
1
Publications
27
Citations
H-Index
2009
Active since
Jae Beom Park is an author specializing in applied physics, engineering, and microelectronics.
Top concepts
EngineeringApplied PhysicsMaterial ScienceMicroelectronicsMaterials Engineering
Publications per year
2009–2009
Etch Characteristics of TiO2 Etched by Using an Atomic Layer Etching technique with BCl3 Gas and an Ar Neutral Beam
Jae Beom Park, Woong Sun Lim, Sang Duk Park et al. · Journal of the Korean Physical Society · 2009 · 27 citations
Materials Science, Materials Engineering, Ar Neutral Beam +6
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