Concepedia

Byoung Jae Park

BJ

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Publications

2

Citations

44

H-Index

2

Active since

2008

Affiliations

Sungkyunkwan University(Current)

Byoung Jae Park is an author at Sungkyunkwan University specializing in applied physics, engineering, and electrical engineering.

Top concepts

Publications per year

2008–2008

2

Publications

2

Atomic layer etching of (100)/(111) GaAs with chlorine and low angle forward reflected Ne neutral beam

Woong Sun Lim, Sang Duk Park, Byoung Jae Park et al. · Surface and Coatings Technology · 2008 · 34 citations

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Plasma induced damage of aggressively scaled gate dielectric (EOT ≪ 1.0nm) in metal gate/high-k dielectric CMOSFETs

K. S. Min, Chang Yong Kang, Ook Sang Yoo et al. · 2008 · 10 citations

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