Publication | Closed Access
Atomic layer etching of graphene for full graphene device fabrication
91
Citations
18
References
2011
Year
Materials ScienceGraphene NanomeshesElectrical EngineeringEngineeringNanoelectronicsNanotechnologyGraphene FiberApplied PhysicsGrapheneAtomic Layer EtchingGraphene NanoribbonPlasma Etching
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