Jongwook Kye

Overcoming scaling barriers through design technology CoOptimization

Lars W. Liebmann, Jia Zeng, Xuelian Zhu et al. · 2016 · 55 citations

Engineering, Collaborative Design, Industrial Engineering +21

Decomposition strategies for self-aligned double patterning

Yuansheng Ma, Jason Sweis, Chris Bencher et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 41 citations

Mathematical Programming, Engineering, Vlsi Design +18

<title>Self-aligned double patterning (SADP) compliant design flow</title>

Yuangsheng Ma, Jason Sweis, Hidekazu Yoshida et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 36 citations

Engineering, Electron-beam Lithography, Computer Architecture +18

Polarization aberration analysis in optical lithography systems

Jongwook Kye, Gregory McIntyre, Yamamoto Norihiro et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 30 citations

Optical Materials, Engineering, Microscopy +16

Insertion strategy for EUV lithography

Obert R. Wood, John Arnold, Timothy A. Brunner et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 30 citations

Short Wavelength Optic, Optical Materials, Engineering +19