Osamu Sugiura

High-mobility poly-Si thin-film transistors fabricated by a novel excimer laser crystallization method

Kazuhiro Shimizu, Osamu Sugiura, M. Matsumura · IEEE Transactions on Electron Devices · 1993 · 99 citations

Optical Materials, Engineering, Dual-beam Irradiation +19

Atomic layer epitaxy of Si using atomic H

Shigeru Imai, Toshio Iizuka, Osamu Sugiura et al. · Thin Solid Films · 1993 · 58 citations

Physics, Applied Physics, Molecular Beam Epitaxy +3

On-Chip Bottom-Gate Polysilicon and Amorphous Silicon Thin-Film Transistors Using Excimer Laser Annealing

Kazuhiro Shimizu, Osamu Sugiura, Masakiyo Matsumura · Japanese Journal of Applied Physics · 1990 · 54 citations

Electrical Engineering, Electronic Devices, On-chip Bottom-gate Polysilicon +15

Drastic Enlargement of Grain Size of Excimer-Laser-Crystallized Polysilicon Films

Do-Hyun Choi, Kazuhiro Shimizu, Osamu Sugiura et al. · Japanese Journal of Applied Physics · 1992 · 53 citations

Materials Science, Polysilicon Thin Films, Engineering +11

A Novel Atomic Layer Epitaxy Method of Silicon

Shigeru Imai, Satoru Takagi, Osamu Sugiura et al. · Japanese Journal of Applied Physics · 1991 · 43 citations

Materials Engineering, Electrical Engineering, Epitaxial Growth +13