Atomic layer epitaxy of Si using atomic H - Concepedia

Concepedia

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Atomic layer epitaxy of Si using atomic H

58

Citations

9

References

1993

Year

Shigeru Imai, Toshio Iizuka, Osamu Sugiura, Masakiyo Matsumura

Thin Solid Films

PhysicsApplied PhysicsMolecular Beam EpitaxySilicon On InsulatorEpitaxial GrowthAtomic H

References

	Year	Citations

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