13
Publications
643
Citations
12
H-Index
1992
Active since
J. L. Alay is an author at Universitat de Barcelona specializing in engineering, applied physics, and materials science.
Top concepts
EngineeringApplied PhysicsMaterial ScienceSurface ScienceChemistryCrystalline DefectsChemical EngineeringOxide SemiconductorsMaterials EngineeringElectrical Engineering
Publications per year
1992–2000
13
13
Influence of oxygen on the formation of ripples on Si
Kathy Elst, Wilfried Vandervorst, J. L. Alay et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1993 · 54 citations
Materials Science, Surface Characterization, Afm Pictures +15
Á. Diéguez, A. Romano‐Rodrı́guez, J. L. Alay et al. · Sensors and Actuators B Chemical · 2000 · 47 citations
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