Y. Tsunashima

Empty-space-in-silicon technique for fabricating a silicon-on-nothing structure

Ichiro Mizushima, Tsutomu Sato, Shun Taniguchi et al. · Applied Physics Letters · 2000 · 138 citations

Engineering, Manufacturing Engineering, Materials Science +15

Micro-structure Transformation of Silicon: A Newly Developed Transformation Technology for Patterning Silicon Surfaces using the Surface Migration of Silicon Atoms by Hydrogen Annealing

Tsutomu Sato, Kunihiro Mitsutake, Ichiro Mizushima et al. · Japanese Journal of Applied Physics · 2000 · 84 citations

Engineering, Materials Engineering, Materials Science +17

Fabrication of Silicon-on-Nothing Structure by Substrate Engineering Using the Empty-Space-in-Silicon Formation Technique

Tsutomu Sato, Ichiro Mizushima, Shuichi Taniguchi et al. · Japanese Journal of Applied Physics · 2004 · 80 citations

Engineering, Manufacturing Engineering, Materials Science +17

Improvement of threshold voltage deviation in damascene metal gate transistors

A. Yagishita, Tomohiro Saito, K. Nakajima et al. · IEEE Transactions on Electron Devices · 2001 · 76 citations

Engineering, Electrical Engineering, Materials Science +17

Process integration technology and device characteristics of CMOS FinFET on bulk silicon substrate with sub-10 nm fin width and 20 nm gate length

K. Okano, T. Izumida, H. Kawasaki et al. · 2006 · 76 citations

Engineering, Electrical Engineering, Microfabrication +16