Concepedia

Kazunori Miyoshi

KM

10

Publications

264

Citations

10

H-Index

1975

Active since

Affiliations

NTT Basic Research Laboratories(Current)

NEC (Japan)

NTT (Japan)

Kazunori Miyoshi is an author at NTT Basic Research Laboratories specializing in engineering, microelectronics, and applied physics.

Top concepts

Publications per year

1975–2002

10

Publications

10

Patterning Characteristics of a Chemically-Amplified Negative Resist in Synchrotron Radiation Lithography

Kimiyoshi Deguchi, Kazunori Miyoshi, T. Ishii et al. · Japanese Journal of Applied Physics · 1992 · 59 citations

, , +21

Geometry of three convex bodies applicable to three-molecule clusters in polyatomic gases

Taro Kihara, Kazunori Miyoshi · Journal of Statistical Physics · 1975 · 53 citations

, , +11

Extendibility of synchrotron radiation lithography to the sub-100 nm region

Kimiyoshi Deguchi, Kazunori Miyoshi, M. Oda et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 38 citations

, , +18

Application of x-ray lithography with a single-layer resist process to subquartermicron large scale integrated circuit fabrication

Kimiyoshi Deguchi, Kazunori Miyoshi, Hiroshi Ban et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 24 citations

, , +18

X-Ray Phase-Shifting Mask for 0.1-µm Pattern Replication under a Large Proximity Gap Condition

Yoh Somemura, Kimiyoshi Deguchi, Kazunori Miyoshi et al. · Japanese Journal of Applied Physics · 1992 · 22 citations

, , +21

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