Concepedia

Author

Yoh Somemura

NTT Basic Research Laboratories

Also Known As

Yoh SOMEMURA, Yoh Somemura, Yoh Somemura Yoh Somemura

9

Publications

47

Citations

3

H-Index

16

Concepts

All Affiliations

NTT Basic Research Laboratories
YS

About

Yoh Somemura is an author at NTT Basic Research Laboratories specializing in optical properties, applied physics, and physics.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

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35

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Applied Physics

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2

35

3

Physics

2

2

35

4

Health Sciences

1

1

22

5

Materials Science

1

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22

Yoh Somemura

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2

Publications

35

Citations

2

H-Index

YearCitations

X-Ray Phase-Shifting Mask for 0.1-µm Pattern Replication under a Large Proximity Gap Condition

Yoh Somemura, Kimiyoshi Deguchi, Kazunori Miyoshi,

Japanese Journal of Applied Physics

1992

22

Effects of Fresnel Diffraction on Resolution and Linewidth Control in Synchrotron Radiation Lithography

Yoh Somemura, Kimiyoshi Deguchi

Japanese Journal of Applied Physics

1992

13

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