Concepedia

Yoh Somemura

YS

2

Publications

35

Citations

2

H-Index

1992

Active since

Affiliations

NTT Basic Research Laboratories(Current)

Yoh Somemura is an author at NTT Basic Research Laboratories specializing in optical properties, applied physics, and physics.

Top concepts

PhysicsMicroscopyEngineeringApplied PhysicsOptical MaterialsOptical PropertiesHealthPhotonicsDiffractionX-ray Imaging

Publications per year

1992–1992

2

Publications

2

X-Ray Phase-Shifting Mask for 0.1-µm Pattern Replication under a Large Proximity Gap Condition

Yoh Somemura, Kimiyoshi Deguchi, Kazunori Miyoshi et al. · Japanese Journal of Applied Physics · 1992 · 22 citations

Optical Materials, Engineering, Electron-beam Lithography +21

Effects of Fresnel Diffraction on Resolution and Linewidth Control in Synchrotron Radiation Lithography

Yoh Somemura, Kimiyoshi Deguchi · Japanese Journal of Applied Physics · 1992 · 13 citations

Optical Materials, Engineering, Electron-beam Lithography +16

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