Kimiyoshi Deguchi

Effect of Acid Diffusion on Resolution of a Chemically Amplified Resist in X-Ray Lithography

Jiro Nakamura, Hiroshi Ban, Kimiyoshi Deguchi et al. · Japanese Journal of Applied Physics · 1991 · 83 citations

Engineering, Electron-beam Lithography, Microscopy +16

Patterning Characteristics of a Chemically-Amplified Negative Resist in Synchrotron Radiation Lithography

Kimiyoshi Deguchi, Kazunori Miyoshi, T. Ishii et al. · Japanese Journal of Applied Physics · 1992 · 59 citations

Optical Materials, Engineering, Electron-beam Lithography +21

Extendibility of synchrotron radiation lithography to the sub-100 nm region

Kimiyoshi Deguchi, Kazunori Miyoshi, M. Oda et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 38 citations

Engineering, Electron-beam Lithography, Microscopy +18

Evaluation of Pressure Uniformity Using a Pressure-Sensitive Film and Calculation of Wafer Distortions Caused by Mold Press in Imprint Lithography

Kimiyoshi Deguchi, Nobuyuki Takeuchi, Akira Shimizu · Japanese Journal of Applied Physics · 2002 · 25 citations

Materials Science, Wafer Distortions, Imprint Pressure +11

Application of x-ray lithography with a single-layer resist process to subquartermicron large scale integrated circuit fabrication

Kimiyoshi Deguchi, Kazunori Miyoshi, Hiroshi Ban et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 24 citations

Engineering, Electron-beam Lithography, Integrated Circuits +18