A. F. Bello

Metrology capabilities and needs for 7nm and 5nm logic nodes

Benjamin Bunday, Eric Solecky, Alok Vaid et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2017 · 38 citations

Engineering, Electrical Engineering, Manufacturing Engineering +17

7/5nm logic manufacturing capabilities and requirements of metrology

Benjamin Bunday, A. F. Bello, Eric Solecky et al. · 2018 · 38 citations

Engineering, Manufacturing Engineering, Materials Science +17

Intelligent methods helping the design of a manufacturing system for die extrusion rubbers

Luis M. López-González, A. F. Bello, Amauri Garcia · International Journal of Computer Integrated Manufacturing · 2003 · 16 citations

Engineering, Manufacturing Engineering, Materials Engineering +17

Sidewall roughness and line profile measurement of photoresist and finFET features by cross-section STEM and TEM image for reference metrology

Kiyoshi Takamasu, Haruki Okitou, Satoru Takahashi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 12 citations

Engineering, Electrical Engineering, Materials Science +17

Assessment of critical dimension small-angle x-ray scattering measurement approaches for FinFET fabrication process monitoring

Charles Settens, Aaron Cordes, Benjamin Bunday et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2014 · 12 citations

Engineering, Electrical Engineering, Materials Science +17