Statistics
Publications
15
Citations
289
H-Index
12
Active since
1982
Affiliations
Kunio Saito is an author at NTT (Japan) specializing in materials science, natural sciences, and materials engineering.
Publications per year
1982–2006
15
15
Using electron cyclotron resonance sputtering in the deposition of ultrathin Al2O3 gate dielectrics
Yoshito Jin, Kunio Saito, Masaru Shimada et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 25 citations
Natural Sciences, Materials Engineering, Materials Science +17
Kunio Saito, Takao Amazawa, Yoshinobu Arita · Journal of The Electrochemical Society · 1993 · 19 citations
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