Concepedia

Yoshito Jin

YJ

Statistics

Publications

12

Citations

211

H-Index

11

Active since

1989

Affiliations

NTT (Japan)(Current)

University of Tsukuba

Hirosaki University

Yoshito Jin is an author at NTT (Japan) specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceElectrical EngineeringSurface ScienceThin FilmsOptoelectronicsPhysicsMicroelectronicsMaterials Engineering

Publications per year

1989–2008

12

Publications

12

Hybrid microlaser encoder

Ryo Sawada, Eiji Higurashi, Yoshito Jin · Journal of Lightwave Technology · 2003 · 31 citations

Photonic Sensor, Optical Materials, Engineering +18

Characterization of tantalum oxy-nitrides deposited by ECR sputtering

Koji Kato, Hiroshi Toyota, Yoshito Jin et al. · Vacuum · 2008 · 27 citations

Materials Science, Materials Engineering, Aluminium Nitride +4

Using electron cyclotron resonance sputtering in the deposition of ultrathin Al2O3 gate dielectrics

Yoshito Jin, Kunio Saito, Masaru Shimada et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 25 citations

Aluminium Nitride, Engineering, Hysteresis Loop +16

Anisotropic Etching of Si and WSiN Using ECR Plasma of SF<sub>6</sub>–CF<sub>4</sub> Gas Mixture

Chiharu Takahashi, Yoshito Jin, Kazumi Nishimura et al. · Japanese Journal of Applied Physics · 2000 · 20 citations

Materials Science, Materials Engineering, Fluorine Radicals +10

Generation of Electron Cyclotron Resonance Neutral Stream and Its Application to Si Etching

Tai Tsuchizawa, Yoshito Jin, Seitaro Matsuo · Japanese Journal of Applied Physics · 1994 · 17 citations

Engineering, Electron-beam Lithography, Cusp Magnetic Field +20

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