Masaru Shimada

Electron cyclotron resonance plasma source for conductive film deposition

Toshiro Ono, Hiroshi Nishimura, Masaru Shimada et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1994 · 44 citations

Engineering, Physics, Plasma Theory +14

Ultrathin oxide films deposited using electron cyclotron resonance sputter

Takao Amazawa, Toshiro Ono, Masaru Shimada et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 35 citations · Full text

Materials Science, Electrical Engineering, Engineering +12

Mechanism for LiNb₃O₈ phase formation during thermal annealing of crystalline and amorphous LiNbO₃ thin films

Housei Akazawa, Masaru Shimada · Journal of materials research/Pratt's guide to venture capital sources · 2007 · 35 citations

Materials Science, Material Analysis, Engineering +10

Nonvolatile memory using Al2O3 film with an embedded Al-rich layer

Shunji Nakata, Kunio Saito, Masaru Shimada · Applied Physics Letters · 2005 · 32 citations

Materials Science, Al2o3 Memory, Electrical Engineering +12

Very high current ECR ion source for an oxygen ion implanter

Yasuhiro Torii, Masaru Shimada, Iwao Watanabe · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1987 · 31 citations

Electrical Engineering, Ion Implantation, Engineering +5