Yoshinobu Arita - Concepedia

Author

Yoshinobu Arita

NTT Basic Research Laboratories

Also Known As

Y Arita, Y. ARITA, Y. Arita, Yoshinobu ARITA, Yoshinobu Arita, Yoshinobu Arita Yoshinobu Arita

Publications

1.1K

Citations

H-Index

Concepts

All Affiliations

NTT Basic Research Laboratories NTT (Japan)

About

Yoshinobu Arita is an author at NTT Basic Research Laboratories specializing in engineering, materials science, and surface science.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	17	26	979
2	Applied Physics	14	20	761
3	Chemical Engineering	12	15	407
4	Chemistry	8	8	312
5	Computer Engineering	1	1	15

Yoshinobu Arita

Publications

Citations

H-Index

Page 1

	Year	Citations
Formation and Properties of Porous Silicon and Its Application Y. Watanabe, Yoshinobu Arita, Takashi Yokoyama, Journal of The Electrochemical Society EngineeringNanoporous MaterialIntegrated CircuitsThin Film Process TechnologySilicon On Insulator	1975	158
Formation and Properties of Porous Silicon Film Yoshinobu Arita, Yoshio Sunohara Journal of The Electrochemical Society Materials ScienceMaterials EngineeringEngineeringNanoporous MaterialPorous Silicon Film	1977	102
Electrical properties and their thermal stability for silicon nitride films prepared by plasma-enhanced deposition Masahiko Maeda, Yoshinobu Arita Journal of Applied Physics EngineeringThin Film Process TechnologySilicon On InsulatorElectrical PropertiesPlasma Processing	1982	66
Heteroepitaxial growth of SrO films on Si substrates Yuichi Kado, Yoshinobu Arita Journal of Applied Physics Materials ScienceMaterials EngineeringElectrical EngineeringEpitaxial GrowthEngineering	1987	65
Understanding heterogeneous catalysis on an atomic scale: a combined surface science and reactivity investigation for the dehydrogenation of ethylbenzene over iron oxide catalysts Christian Kuhrs, Yoshinobu Arita, W. Ranke, Topics in Catalysis	2000	54
Evaluation of a copper metallization process and the electrical characteristics of copper-interconnected quarter-micron CMOS Nobuyoshi Awaya, Hiroshi Inokawa, Ei YAMAMOTO, IEEE Transactions on Electron Devices EngineeringSilicon On InsulatorInterconnect (Integrated Circuits)Electrical CharacteristicsWafer Scale Processing	1996	52
Etched Shape Control of Single‐Crystal Silicon in Reactive Ion Etching Using Chlorine Masaaki Sato, Yoshinobu Arita Journal of The Electrochemical Society Materials ScienceChemical EngineeringEngineeringSilicon TrenchCrystalline Defects	1987	48
Plasma-Enhanced Chemical Vapor Deposition of Copper Nobuyoshi Awaya Nobuyoshi Awaya, Yoshinobu Arita Japanese Journal of Applied Physics Materials ScienceChemical EngineeringElectrical EngineeringEngineeringPlasma Processing	1991	45
Formation and oxidation of porous silicon by anodic reaction Yoshinobu Arita Journal of Crystal Growth Chemical EngineeringEngineeringNanoporous MaterialCorrosionSurface Science	1978	43
Double-level copper interconnections using selective copper CVD Nobuyoshi Awaya, Yoshinobu Arita Journal of Electronic Materials 3D Ic ArchitectureElectrical EngineeringEngineeringAdvanced Packaging (Semiconductors)Nanoelectronics	1992	41

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