Concepedia

T.-Y. Chung

TC

4

Publications

102

Citations

4

H-Index

2007

Active since

Affiliations

Lam Research (United States)(Current)

University of Maryland, College Park

University of California, Berkeley

T.-Y. Chung is an author at Lam Research (United States) specializing in engineering, optical properties, and materials science.

Top concepts

Publications per year

2007–2012

4

Publications

4

Photoresist modifications by plasma vacuum ultraviolet radiation: The role of polymer structure and plasma chemistry

F. Weilnboeck, Robert L. Bruce, Sebastian Engelmann et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2010 · 47 citations

, , +21

Real-time measurements of plasma photoresist modifications: The role of plasma vacuum ultraviolet radiation and ions

F. Weilnboeck, N. Kumar, G. S. Oehrlein et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2012 · 23 citations · Full text

, , +15

Electron, ion and vacuum ultraviolet photon effects in 193 nm photoresist surface roughening

T.-Y. Chung, D. Nest, David B. Graves et al. · Journal of Physics D Applied Physics · 2010 · 20 citations

, , +21

Fabrication and low temperature thermoelectric properties of NaxCoO2 (x=0.68 and 0.75) epitaxial films by the reactive solid-phase epitaxy

Wei‐Jen Chang, C. C. Hsieh, T.-Y. Chung et al. · Applied Physics Letters · 2007 · 12 citations · Full text

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