A. Ya. Lopatin

Current status and development prospects for multilayer X-ray optics at the Institute for Physics of Microstructures, Russian Academy of Sciences

A. D. Akhsakhalyan, E. B. Kluenkov, A. Ya. Lopatin et al. · Journal of Surface Investigation X-ray Synchrotron and Neutron Techniques · 2017 · 59 citations

Free-standing spectral purity filters for extreme ultraviolet lithography

Evgeny B. Kluenkov, A. Ya. Lopatin, Leonid A. Sjmaenok et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2012 · 41 citations

Ultraviolet Light, Optical Materials, Engineering +21

<title>Multilayer Zr/Si filters for EUV lithography and for radiation source metrology</title>

M. S. Bibishkin, E. B. Kluenkov, A. Ya. Lopatin et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 40 citations

Engineering, Electron-beam Lithography, Euv Lithography +19

Thin film multilayer filters for solar EUV telescopes

E. B. Kluenkov, Sergey Kuzin, A. Ya. Lopatin et al. · Applied Optics · 2016 · 38 citations

Materials Science, High Thermal Stability, Electrical Engineering +14

Conversion efficiency of a laser-plasma source based on a Xe jet in the vicinity of a wavelength of 11 nm

A. Ya. Lopatin, A. N. Nechay, S. Yu. Zuev · AIP Advances · 2018 · 37 citations · Full text

Engineering, Conversion Efficiency, Laser-plasma Interaction +18