M. S. Bibishkin

Multilayer optics for XUV spectral region: technology fabrication and applications

S. S. Andreev, A. D. Akhsakhalyan, M. S. Bibishkin et al. · Open Physics · 2003 · 61 citations · Full text

Optical Materials, Engineering, Extreme Ultra-violet Ranges +16

<title>Laboratory methods for investigations of multilayer mirrors in extreme ultraviolet and soft x-ray region</title>

M. S. Bibishkin, D. P. Chekhonadskih, E. B. Kluyenkov et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 51 citations

X-ray Spectroscopy, Engineering, Microscopy +22

Ultra-short period X-ray mirrors: Production and investigation

M. S. Bibishkin, A. A. Fraerman, K. A. Prokhorov et al. · Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment · 2005 · 41 citations

Materials Science, X-ray Spectroscopy, Engineering +4

<title>Multilayer Zr/Si filters for EUV lithography and for radiation source metrology</title>

M. S. Bibishkin, E. B. Kluenkov, A. Ya. Lopatin et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 40 citations

Engineering, Electron-beam Lithography, Euv Lithography +19

Short-period multilayer X-ray mirrors

S. S. Andreev, M. S. Bibishkin, E. B. Kluenkov et al. · Journal of Synchrotron Radiation · 2003 · 39 citations · Full text

Optical Materials, X-ray Spectroscopy, Engineering +16