E. B. Kluenkov

Multilayer optics for XUV spectral region: technology fabrication and applications

S. S. Andreev, A. D. Akhsakhalyan, M. S. Bibishkin et al. · Open Physics · 2003 · 61 citations · Full text

Natural Sciences, Materials Science, Physics +15

Current status and development prospects for multilayer X-ray optics at the Institute for Physics of Microstructures, Russian Academy of Sciences

A. D. Akhsakhalyan, E. B. Kluenkov, A. Ya. Lopatin et al. · Journal of Surface Investigation X-ray Synchrotron and Neutron Techniques · 2017 · 60 citations

Natural Sciences, Materials Science, Physics +15

<title>Multilayer Zr/Si filters for EUV lithography and for radiation source metrology</title>

M. S. Bibishkin, E. B. Kluenkov, A. Ya. Lopatin et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 40 citations

Natural Sciences, Materials Engineering, Materials Science +13

Thin film multilayer filters for solar EUV telescopes

E. B. Kluenkov, Sergey Kuzin, A. Ya. Lopatin et al. · Applied Optics · 2016 · 40 citations

Natural Sciences, Materials Science, Physics +16

Short-period multilayer X-ray mirrors

S. S. Andreev, M. S. Bibishkin, E. B. Kluenkov et al. · Journal of Synchrotron Radiation · 2003 · 39 citations · Full text

Natural Sciences, Materials Science, Physics +16